Electronics & Semiconductors

Electronic and data centers require precisely controlled conditions. Room temperature must be kept low in order to keep hard working servers from overheating. However, lowering the temperature can cause condensation, which can be dangerous in an electronic environment. The presence of excessive humidity/moisture causes rust on components and corrosion of 'circuit points'. Semiconductor masks and photoresists need a clean dry environment.

With the help of Munters, temperature and humidity are controlled independently; allowing proper working conditions for the servers, as well as extending the life of server components. Exhaust air streams can be cleaned of VOCs protecting our precious environment.  Munters heat exchangers and recovery units can capture exhaust air streams to recupe energy and reduce operating costs.

Many semiconductor and electronics manufacturing processes and operations require closely controlled dry conditions. The presence of excessive humidity/moisture causes corrosion of 'circuit points', condensation on a microchip's circuit surface and improper adhesion of photoresists causing operational failure of the semiconductor assembly process. To provide the right working conditions in dry rooms and clean rooms, desiccant dehumidifiers are used. Munters DesChamps recovers exhaust /waste heat, and Muntes Zeol can capture harmful VOC’s that pollute our world.

Overall environmental control of humidity temperature and pollutants — an important variable to manage:

• Prevent corrosion of "circuit points"
• Prevent condensation on microchips circuit surface
• Protect equipment
• Provide better adhesion of photoresists
• Reduce energy consumption
• Reduce discharge pollutants
  

Thus environmental control becomes a must in the following areas:

Assembly Area
In the production of semiconductors and integrated circuits, excessive moisture adversely effects the bonding process and increases defects. Photosensitive polymer compounds called photoresists are used to mask circuit lines for the etching process. Due to their hygroscopic nature they absorb moisture resulting in the microscopic circuit lines being cut or bridged, leading to circuit failure.

Wafer Fabrication Area
During wafer manufacture, the spinners spray developer on the wafer surface, causing the solvent present on the wafer to evaporate rapidly, thereby cooling the wafer surface. This results in condensation of water vapor from the air on the wafer surface. This extra water on the wafer causes characteristics of the developer to change. The resist also absorbs the moisture causing the polymer to swell. Controlling relative humidity eliminates the possibility of cooling the wafer's surface lower than the dewpoint of the surrounding air, thus preventing failure and spoilage. Munters Energy Recovery options help reduce operating costs, and Munters Pollution Control units protect the environment.